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Preparation of Al-doped NiO thin films by spray pyrolysis technique for CO gas sensing

Yahya M. Abdul-Hussein , Huda J. Ali , L. A. Latif , Mudar Ahmed Abdulsattar , Husham M. Fadhel


Undoped Nickel oxide (NiO) and Al-doped (NiO:Al) thin films were prepared by spray pyrolysis technique from a hydrated salt solution of nickel chloride (NiCl2.6H2O). The structural, morphological and sensing properties of the prepared films have been studied. X-ray diffraction investigation showed a polycrystalline (NiO) phase with a cubic crystalline structure. The morphology of the surface samples of thin films was investigated by Atomic Force Microscopic (AFM). The sensing properties of prepared nickel oxide thin films showed that the sensitivity to CO gas increased with changing aluminum doping.

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